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Experimental Devices

Galvano scanner

<Control spec>

Response frequency: over some kHz

Positioning accuracy: some μm

Fig. Prototype galvano scanner.Fig. Prototype galvano scanner.

 

Fig. Galvano scanners for laser processing machinesFig. Galvano scanners for laser processing machines

 

 

Linear motor / ball screw -driven table

<Control spec>

Response frequency: over some ten Hz

Positioning accuracy: some μm


Fig. Parallel linear motor-driven tables.Fig. Parallel linear motor-driven tables.

Fig. Linear motor-driven high precision table.Fig. Linear motor-driven high precision table.

 

Piezoelectric actuator-driven optic mirror

<Control spec>

Response frequency: over some kHz

Positioning accuracy: some μm

Fig. PZT actuator.Fig. PZT actuator.

 

Two-wheeled inverted pendulum

<Use>

Simulator for unstable mobilities.